Study of Structural and electrical Properties of WO3 as Thin Films

Malek Ali, Mayada Hbous


Three thin films were prepared by PVD starting from WO3 powder with thicknesses    ( 998.7, 1620, 2240 nm ) respectively on glass substrates under limited thermal and pressure conditions, studied their I-V characteristics and calculated the sensitivity for 100 ppm of ethanol vapor adsorption (The temperature of the films have been changed from 25°C to 350°C).       A comparison among them was achieved at 300 °C as an operating degree and found that the 1620 nm WO3 has more sensitivity and has more power to adsorb for ethanol vapor on it. The crystal structure of the prepared WO3 thin films were characterized by X-ray diffraction, then the comparison of the development which happened on the crystal structure reasons of deposition were studied. the crystal size has been calculated from patterns X-ray diffraction depended Scherrer Equation

Keywords: Tungsten Oxide WO3, Ethanol Vapor, Sensing properties, thin film.

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ISSN (Paper)2224-719X ISSN (Online)2225-0638

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