Studying of Thickness Effects on the Optical and Structural Properties of ZnO/Ag/ZnO Multilayer Thin Films by Using Surface Plasmon Resonance

Abstract

In this paper, the Effect of Surface Plasmon's on Optical and structure Properties of Multilayer ZnO/Ag/ZnO thin film have been investigated. These properties could be tuned using the plasmonic properties of the two layers of ZnO. The two thin layers of ZnO with thicknesses varying from 30 nm to 40 nm and the intermediate Ag layer of 6 nm thickness have been deposited using radio frequency magnetron sputtering and Vacuum Deposition technique on glass substrate respectively. multilayered ZnO/Ag/ZnO thin films with c-axis-oriented wurtzite structure is obtained at a growth temperature 300 ◦C. X-ray diffraction shows that the full width at half maximum θ-2θ of (002) ZnO/Ag/ZnO is located at approximately 34.28^◦. UV-VIS Spectrometer has been used to measure the optical transparency. We also studied the influence of ZnO thickness on optical properties of the ZnO/Ag/ZnO composite and the effect mechanism by surface plasmon.

Keywords: Surface plasmon resonance, Dielectric/Metal/Dieletric thin films, Magnetron sputtering, Vacuum Deposition