The Effect of Al Doping on the Sensitivity of SnO2 Films Prepared by Chemical Spray Pyrolysis

Abstract

Pure and Al-doped SnO₂ as gas sensors with properties characteristics provoking gas sensitivity were used for measuring CO₂ atmospheres. In this paper we discussed the optical properties of undoped and Al (each 3, 5 and %) doped SnO₂ thin films were synthesized by spray pyrolysis on glass substrate. The samples were characterized using X-ray diffraction (XRD) and gas sensitivity. The XRD analysis reveals that the Al dopants were substituted into rutile SnO₂ nanoparticles without forming any secondary phase. The average particle size of the samples was increasing with increasing Al concentration. From XRD and AFM micrograph it was confirmed, the grain size in the range of 22.4-34.4 nm. The study reveals polycrystalline structure with prominent peaks. In particular, 7% Al-SnO₂ films have a higher sensitivity (30%).

Keywords: Structural, gas sensitivity properties, Aluminum (Al) doped , Tin oxide (SnO2)

nanocrystal.

DOI: 10.7176/APTA/76-02

Publication date:March 31^st 2019