Design of Delta Sigma Modulators for Integrated Sensor Applications

Abstract

The paper presents and explores the implementation of Delta Sigma Modulators for Integrated sensor applications. Elaborate design procedures and trade-offs faced have been presented. Starting at the block and topology level, comparisons of various feasible choices have been presented, along with the suited applications. Circuit level comparisons and trade-offs such as OTA and comparator design have also been presented. Finally, simulations have been shown for a modulator designed as per above criteria for integrated accelerometer applications.

Keywords: MEMS, Delta Sigma Modulators, Dynamic Range, Integrated sensors